Campbell, Stephen A. <br/><br/>
The Science and Engineering of Microelectronic Fabrication  

 - 2nd 
 - New York  ; Oxford University Press  , 2012 
 - 603p.  ; 20 x 14 x 4 cm 
<br/><br/><label>ISBN: </label>9780198084808 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor
<br/><br/><label>Dewey Class. No.: </label>621.3815 CAM