| 000 | 00478nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20240805120257.0 | ||
| 008 | 240805b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780198084808 | ||
| 082 | _a621.3815 CAM | ||
| 100 | _a; Campbell, Stephen A. | ||
| 245 | _aThe Science and Engineering of Microelectronic Fabrication | ||
| 250 | _a2nd | ||
| 260 |
_aNew York _b; Oxford University Press _c, 2012 |
||
| 300 |
_a; 603p. _c; 20 x 14 x 4 cm |
||
| 650 | _aSemiconductor | ||
| 942 | _cBK | ||
| 999 |
_c187 _d187 |
||