The Science and Engineering of Microelectronic Fabrication (Record no. 187)

MARC details
000 -LEADER
fixed length control field 00478nam a22001697a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20240805120257.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 240805b |||||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780198084808
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815 CAM
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name ; Campbell, Stephen A.
245 ## - TITLE STATEMENT
Title The Science and Engineering of Microelectronic Fabrication
250 ## - EDITION STATEMENT
Edition statement 2nd
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. New York
Name of publisher, distributor, etc. ; Oxford University Press
Date of publication, distribution, etc. , 2012
300 ## - PHYSICAL DESCRIPTION
Extent ; 603p.
Dimensions ; 20 x 14 x 4 cm
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductor
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Bill no. Bill date Permanent Location Current Location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
    Dewey Decimal Classification     10 23-Jul-2024 NAMTECH:Resource center NAMTECH:Resource center 08/05/2024   621.3815 CAM 424 08/05/2024 08/05/2024 Books