The Science and Engineering of Microelectronic Fabrication (Record no. 187)
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000 -LEADER | |
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fixed length control field | 00478nam a22001697a 4500 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20240805120257.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 240805b |||||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780198084808 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3815 CAM |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | ; Campbell, Stephen A. |
245 ## - TITLE STATEMENT | |
Title | The Science and Engineering of Microelectronic Fabrication |
250 ## - EDITION STATEMENT | |
Edition statement | 2nd |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc. | New York |
Name of publisher, distributor, etc. | ; Oxford University Press |
Date of publication, distribution, etc. | , 2012 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | ; 603p. |
Dimensions | ; 20 x 14 x 4 cm |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Semiconductor |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Books |
Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Bill no. | Bill date | Permanent Location | Current Location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
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Dewey Decimal Classification | 10 | 23-Jul-2024 | NAMTECH:Resource center | NAMTECH:Resource center | 08/05/2024 | 621.3815 CAM | 424 | 08/05/2024 | 08/05/2024 | Books |